Trazar AMU10D-4 rf impedance matching network novellus

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Subject: Trazar AMU10D-4 rf impedance matching network novellus
High Power RF Products: 5 kW (AMU10D-2)
* Maximum RF Power: 5kW subject to load impedance
* Network Input Impedance: 50 Ohms nominal (N connector)
* Maximum Output Voltage: Nominally 300 V peak at 13.56 MHz
* Coaxial Connector: HN or LC connectors
* Reflected Power: 1% max. of forward power for forward power between 20W and 5kW (13.56 MHz generator only)
* Primary AC Power: 120 + 10%, -15% RMS volts, 50-60 Hz, 1 Amp RMS max. connector, IEC 320
* Fuse: 1 Amp slow blow, 0.25 diameter x 1.25 in.
* User Interface: DA-15, 15-pin female sub-miniature D
* Outline Dimensions: 152.4 x 310.9 x 322.4 mm (6.00 x 12.24 x 12.69 inches) nominal
* Weight: 6.4 kg (14 pounds) nominal
* Mounting Surface: 70 degrees C maximum
* Maximum Altitude: 1700 meters (5577 feet) Determines internal arcing voltage limits
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