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Showa Optical Coating Machine Model: SGC-26SA-RF Low vacumm system: ULVAC VS2401 Rotary Pump+ULVAC PRC-012AS High vacumm system: SHOWA SHINKU SFD-26C oil Diffusion Pump. JEOL JST-10F EB-Source Power Supply Kyosan 3KW RF GENERATOR for Assisted Deposition Optical monitoring system. Wavelength monitoring range 300 nm ~ 2600 nm. Inficon IC/5 Deposition Controller Condition: No important component loss Substrate holding fixture: Dome Class 1000 clean room environment for past 3 years |
