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Semi Line Leybold Cool VAC 1500SL Cryopump System with Automatic Fast Regeneration Inventory item #2175 Includes Operating instructions COOLVAC 1500 SL Advanced: Refrigerator cryopump Cryopumps are high-vacuum pumps which remove gases and vapors from the vacuum chamber by means of condensation and adsorption. The COOLVAC features a fast regeneration device. Attached to the COOLVAC is the COOLVAC PM (pump Module) and POWER SUPPLY. The PM is an interface for pump control and controls the heaters. Furthermore, it has a resistant memory module for relevant pump data up to 30 regeneration cycles. The POWER SUPPLY unit supplies the regeneration heaters, the cold head motor of the COOLVAC and the system control with power. This Semi Line Leybold Cool VAC 1500SL Cryopump System is new surplus in the original plastic bagging, opened only for pictures and in the original box. Monday - Friday 8:30 AM - 5:00 PM Mountain Standard Time Closed Saturday, Sunday and all major US holidays. SEMICONDUCTOR EQUIPMENT SPARES |
