Canon smif reticle changer lithography equipment

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Subject: Canon smif reticle changer lithography equipment
Comments: SMIF reticle changer for Canon FPA300 i5 . Including 2 SMIF ports for ASYST SMIF pods, 1 or 6 reticles. The reticle changer was set up and tested by Canon before it was deinstalled and replaced with a standard reticle changer.No pellical particle checker, 1 cable is missing.