Asml svg 90S coater developer track system


Subject: Asml svg 90S coater developer track system
SVG Model 90S Tool is in pristine condition. Serial Number : 9712CAB-08 Wafer Size : 200 Date Manufactured : 01-01-1997 Wafer Size: 200mm, notched, System on floor Right hand only unit 104” Stand-Alone Cabinet 2 Coat Modules w/chemical edge bead removal, 2 Develop Modules, 6 Vacuum Back Ovens, 2 Vapor Prime Ovens, 3 chill Plates, 1 OEBR Module Photoresist Temperature control Air Temperature and Humidity control(Coater and Developer) Complete air recirculation environmental control over all modules 4 serial arms and 1 90SE serial arm Floor is solid SS spill containment w/overflow sensors Solid doors in front of gauges and flow meters Control Module on CES, (left or right-integrated) Interface is rear pull 208 volts, 3-phase 60Hz Coater direct floor drain (Tee in cabinet) Developer direct floor drain (Tee in cabinet) Full clogged drain sensor on each coater Full SEMI S2-93 Containment for solvent/pump drawer enclosures, bulkhead Facility sensors for vacuum generators, DI water and Caustic exhaust SECS Communication Port Millipore controller / resist pump upgrades Deinstalled in working order. Currently warehoused. Item being sold as-is, where is.
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